Formation of diamond trenches with flat {111} sidewalls via thermochemical etching by Ni films in water vapor
Masatsugu Nagai, Tsubasa Matsumoto, Satoshi Yamasaki, Norio Tokuda, Moriyoshi Haruyama, Yukako Kato, Hironori Yoshioka, Hitoshi Umezawa, Hiromitsu Kato, Masahiko Ogura, Daisuke Takeuchi, Yoshiyuki Miyamoto, Toshiharu Makino,
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